Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Lube and Hydraulic Oil Filtration

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 36in 91.44cm

Product ID: HC2296FKS36H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 39 Inches

Product ID: EB1401K01039Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 2000
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
Filter Removal Rating (μm)
3 µm
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Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 16 inches

Product ID: F1332802
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron
Filter Removal Rating (μm)
7 µm
Nominal Length (Imperial)
16 in
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Ultipor III Glass Fiber Chloroprene 16in 40.64cm

Product ID: F1364497
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Nominal Length (Imperial)
16 in
Nominal Length (Metric)
40.64 cm
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Ultipor Glass Fiber 5µm Nitrile Seal 8in 20.32cm length

Product ID: F1364531
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2206
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating
5 micron, Beta 1000
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Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 13 inches

Product ID: F1368441
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 2000
Element Series
HC8900
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 16 inches

Product ID: F1368442
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 2000
Element Series
HC8900
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
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This product is currently not available. Please contact us for more information.

Ultipleat SRT Glass Fiber 22 micron (Beta 1000) Nitrile 20in 50.8cm

Product ID: F1389409
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
UE619
Family
Ultipleat SRT
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 1000
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Ultipleat SRT Glass Fiber 7 micron (Beta 1000) Nitrile 20in 50.8cm

Product ID: F1389414
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
UE619
Family
Ultipleat SRT
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
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KIT HYDRAULC PALLSCOPE KF TEST product photo

KIT HYDRAULC PALLSCOPE KF TEST

Product ID: F1393177
Unit of Measure
1/EA
Min Order Qty
1

Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 4 inches

Product ID: F1394844
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 2000
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
Filter Removal Rating (μm)
7 µm
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ELEMENT 0961KR18H

Product ID: HC0961FKR18H
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Element Series
HC0961
Family
Ultipor III
Filter Removal Rating (μm)
40 µm
Nominal Length (Imperial)
18 in
Nominal Length (Metric)
45.72 cm
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2,873 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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