Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Product Use

Lube and Hydraulic Oil Filtration

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 36in 91.44cm

Product ID: HC2296FKS36H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes
PCM500WUC MONITOR CLEANLINESS product photo

PCM500WUC MONITOR CLEANLINESS

Product ID: PCM500WUC
Unit of Measure
1/EA
Min Order Qty
1

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 12 μm, GlassFiber, Length 26 Inches

Product ID: HC8314FRS26Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC8314
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
See All Attributes
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 16 inches

Product ID: HC9600FRN16Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
7 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 13 inches

Product ID: HC9604FRN13H
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
7 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 8 inches

Product ID: HC9800FRN8Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
7 µm
Membrane Material
Glass Fiber

Coralon Glass Fiber 12µm Nitrile Seal 30in 76.2cm length (REPLACED BY HC2286FRS30H50YT)

Product ID: HC2286FCS30H50YT
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2286
Family
Coralon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes
RC778NZ086Z INDICATOR product photo

RC778NZ086Z INDICATOR

Product ID: RC778NZ086Z
Unit of Measure
1/EA
Min Order Qty
1

ELEMENT

Product ID: ACA530F25
Unit of Measure
1/EA
Min Order Qty
1
Family
-
WS18 - 1/2" BSP 100mm Probe 2m Cable product photo

WS18 - 1/2" BSP 100mm Probe 2m Cable

Product ID: WS18DSC08
Unit of Measure
1/EA
Min Order Qty
1
WS18 - 1/2" NPT 200mm Probe 5m Cable product photo

WS18 - 1/2" NPT 200mm Probe 5m Cable

Product ID: WS18DSB08L05
Unit of Measure
1/EA
Min Order Qty
1
WS18 - 1/2" NPT 100mm Probe 5m Cable product photo

WS18 - 1/2" NPT 100mm Probe 5m Cable

Product ID: WS18DSB0805
Unit of Measure
1/EA
Min Order Qty
1
2,873 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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