Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Cartridge Length (Imperial)

4 in

Product Use

Lube and Hydraulic Oil Filtration

Ultipor, 3000psi Non-bypass Simplex Hsg, 0.75in BSP Ports, 4in Length, Nitrile Seals

Product ID: HH9021C12RW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Ultipor
Pressure Rating
3000 psi
Port Size
0.75 in
Number of Cartridges
1
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HHT200A161CSRBG Assembly Filter In-Tank

Product ID: HHT200A161CSRBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
150 psi
Port Size
1 in
Number of Cartridges
1
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Versalon, 150psi Simplex Hsg, 0.75in SAE Ports, 4in Length, Nitrile Seals

Product ID: HHT200A121CTRBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
150 psi
Port Size
0.75 in
Number of Cartridges
1
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Ultipor, 3000psi Non-bypass Simplex Hsg, 0.75in BSP Ports, 4in Length, EPDM Seals

Product ID: HJ9021C12RW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Ultipor
Pressure Rating
3000 psi
Port Size
0.75 in
Number of Cartridges
1
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ASSEMBLY HOUSING HZ9021C12RW1

Product ID: HZ9021C12RW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Ultipor
Pressure Rating
3000 psi
Port Size
0.75 in
Number of Cartridges
1
See All Attributes

Ultipor, 3000psi Non-bypass Simplex Hsg, 0.75in SAE Ports, 4in Length, Fluorocarbon Seals

Product ID: HZ9021A12RW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Ultipor
Pressure Rating
3000 psi
Port Size
0.75 in
Number of Cartridges
1
See All Attributes

Ultipor, 3000psi Non-bypass Simplex Hsg, 0.75in Manifold Mount, 4in Length, Fluorocarbon Seals

Product ID: HZ9021K12RW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
4 in
Family
Ultipor
Pressure Rating
3000 psi
Port Size
0.75 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1in BSP Ports, 4in Length, Fluorocarbon Seals

Product ID: HZ9801C16RW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Ultipor, 6000psi Non-bypass Simplex Hsg, 1in SAE Ports, 4in Length, Fluorocarbon Seals

Product ID: HZ9801A16RW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
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Versalon, 1015psi Simplex Hsg, 1in BSP Ports, 4in Length, Fluorocarbon Seals

Product ID: HZF310C16CSRB00001
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
1015 psi
Port Size
1 in
Number of Cartridges
1
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HZG210C08CSRG0X160 Assembly Filter

Product ID: HZG210C08CSRG0X160
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
3625 psi
Port Size
0.5 in
Number of Cartridges
1
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HZG310A16CSRG11X160 FILTER ASSEMBLY

Product ID: HZG310A16CSRG00001
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
3625 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes
53 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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