Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Pre-Filtration

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT1040UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches

Product ID: NXT310U
Unit of Measure
30/EA
Min Order Qty
30
Micron
3 micron
CLR 5-30-DOEE product photo

CLR 5-30-DOEE

Product ID: CLR530DOEE
Unit of Measure
12/EA
Min Order Qty
12

HDC® II membrane 47 mm diameter discs, 20 µm removal rating, 17 cm² EFA, pack of 25

Product ID: FTKJ200
Unit of Measure
1/EA
Min Order Qty
1
Format
47 mm disc
Removal Rating
20 µm
Effective Filtration Area (Metric)
17 cm²
Membrane Material
Polypropylene
Membrane Brand
HDC II
Industry-Specific Certification
Pharmaceutical Grade
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FTKJ060 product photo

FILTER TEST KIT J060 04725

Product ID: FTKJ060
Unit of Measure
1/BOX
Min Order Qty
1
HDC® II membrane in Kleenpak™ capsule, 4.5 µm removal rating, 600 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections product photo

HDC® II membrane in Kleenpak™ capsule, 4.5 µm removal rating, 600 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections

Product ID: KA1J045P1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
4.5 µm
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HDC® II membrane in Kleenpak™ capsule, 6 µm removal rating, 300 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections product photo

HDC® II membrane in Kleenpak™ capsule, 6 µm removal rating, 300 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections

Product ID: KA1J060P1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
6 µm
See All Attributes
HDC® II membrane in Kleenpak™ capsule, 1.2 µm removal rating, 600 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections product photo

HDC® II membrane in Kleenpak™ capsule, 1.2 µm removal rating, 600 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections

Product ID: KA1J012P1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.2 µm
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HDC® II membrane in Kleenpak™ capsule, 10 µm removal rating, 300 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections product photo

HDC® II membrane in Kleenpak™ capsule, 10 µm removal rating, 300 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections

Product ID: KA1J100P1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
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This product is currently not available. Please contact us for more information.

HDC® II membrane in Kleenpak™ capsule, 0.6 µm removal rating, 1000 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections product photo

HDC® II membrane in Kleenpak™ capsule, 0.6 µm removal rating, 1000 cm² EFA, 1½ in sanitary flange inlet and ¼-½ in outlet connections

Product ID: KA2J006P1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.6 µm
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FEATURED

Emflon® PFRW Junior Style Filter Cartridge, MCY4463PFRWH4

Product ID: MCY4463PFRWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
2800 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
5.3 in
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Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches

Product ID: NXA0510U
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
922 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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