Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Gasket / O-Ring Material

Fluorocarbon Elastomer

Product Use

Pre-Filtration

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXA0520UM3V
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron
NXA 10-29.25U-DOEV product photo

Nexis, NXA, 10 μm, 74.3 cm (29.25 in), DOE with elastomer gasket seals and end caps, Fluorocarbon Elastomer gasket

Product ID: NXA102925UDOEV
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 micron
Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer product photo

Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer

Product ID: NXA1030UM3V
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 micron
Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer product photo

Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer

Product ID: NXA1040UM3V
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 micron
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXA120UM3V
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron
Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: NXA530UM8V
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: NXT1030UM8V
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT120UM3V
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT20020UM3V
Unit of Measure
1/EA
Min Order Qty
1
Micron
200 micron
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: NXT20030UM8V
Unit of Measure
1/EA
Min Order Qty
1
Micron
200 micron
NXT 5-10U-M3V product photo

Nexis, NXT, 5 μm, 25.4 cm (10 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), Fluorocarbon Elastomer gasket

Product ID: NXT510UM3V
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 micron
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: NXT530UM8V
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 micron
98 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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