Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Element Series

HC2618

Beta Rating

BETA 1000

Red1000 Glass Fiber 3 micron (Beta 1000) Fluorocarbon 18in 45.72cm

Product ID: HC2618FAZ18Z
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2618
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 1000)
See All Attributes

Ultipor Glass Fiber 5µm Fluorocarbon Seal 36in 91.44cm length

Product ID: HC2618FKP36Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor Glass Fiber 12µm Fluorocarbon Seal 36in 91.44cm length

Product ID: HC2618FKS36Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Ultipor Glass Fiber 12µm Fluorocarbon Seal 18in 45.72cm length

Product ID: HC2618FKS18Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Ultipor Glass Fiber 25µm Fluorocarbon Seal 36in 91.44cm length

Product ID: HC2618FKT36Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
See All Attributes

Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 18in 45.72cm (REPLACED BY HC2618FRN18Z)

Product ID: HC2618FKN18H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
See All Attributes

Red1000 Glass Fiber 3 micron (Beta 1000) Nitrile 36in 91.44cm (REPLACED BY HC2618FRZ36Z)

Product ID: HC2618FKZ36H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 1000)
See All Attributes

Red1000 Glass Fiber 5 micron (Beta 1000) Nitrile 36in 91.44cm (REPLACED BY HC2618FRP36Z)

Product ID: HC2618FCP36HX321
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 3 micron (Beta 1000) Nitrile 4in 10.16cm

Product ID: HC2618FCZ34HX321
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 1000)
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 36in 91.44cm (REPLACED BY HC2618FRS36Z)

Product ID: HC2618FKS36H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor Glass Fiber 7µm Nitrile Seal 18in 45.72cm length

Product ID: HC2618FKR18H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

Red1000 Anti-Static Glass Fiber 7 micron (Beta 1000) Fluorocarbon 18in 45.72cm length (REPLACED BY HC2618FRN18Z)

Product ID: HC2618FMN18Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2618
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

24 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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