Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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BETA 1000

Ultipor Glass Fiber 7µm Fluorocarbon Seal 8in 20.32cm length

Product ID: HC8904FKN8Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8904
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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Ultipor Glass Fiber 7µm Nitrile Seal 4in 10.16cm length

Product ID: HC9020FKN4HYQ62
Unit of Measure
10/EA
Min Order Qty
10
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9020
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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Ultipor Glass Fiber 12µm Nitrile Seal 13in 33.02cm length

Product ID: HC9600FKS13HYQ62
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9600
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Ultipor Glass Fiber 12µm Nitrile Seal 16in 40.64cm length

Product ID: HC9606FDS16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9606
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Ultipor Glass Fiber 5µm Nitrile Seal 10in 25.4cm length

Product ID: HC9730FKP10H
Unit of Measure
4/EA
Min Order Qty
4
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9730
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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Ultipor Glass Fiber 7µm Nitrile Seal 5in 12.7cm length

Product ID: HC9730FKN5H
Unit of Measure
8/EA
Min Order Qty
8
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9730
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

Ultipor Glass Fiber 5µm Nitrile Seal 27in 68.58cm length

Product ID: HC9735FKP27H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9735
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor Glass Fiber 5µm Fluorocarbon Seal 18in 45.72cm length

Product ID: HC9735FKP18Z
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9735
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor Glass Fiber 5µm Nitrile Seal 8in 20.32cm length

Product ID: F1364531
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2206
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating
5 micron, Beta 1000
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Ultipor Glass Fiber 7µm Nitrile Seal 18in 45.72cm length

Product ID: HC0101FKN18HY533
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0101
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating
7 micron, Beta 1000
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Ultipor Glass Fiber 3µm Nitrile Seal 36in 91.44cm length

Product ID: HC0101FKZ36H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0101
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
See All Attributes

Ultipor Glass Fiber 12µm Fluorocarbon Seal 19in 48.26cm length

Product ID: HC2225FKS19Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2225
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes
33 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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