Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Filter Removal Rating

5 µm

Beta Rating

BETA 1000

Filter Media

Glass Fiber

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC9601FDP8H#28
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9601
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Red1000 Glass Fiber 5 micron (Beta 1000) Fluorocarbon 3in 7.62cm (REPLACED BY HC2206FRP3Z)

Product ID: HC2206FKP3Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2206
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 5 micron (Beta 1000) Fluorocarbon 4in 10.16cm (REPLACED BY HC2216FRP4Z)

Product ID: HC2216FKP4Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2216
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
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This product is currently not available. Please contact us for more information.

Ultipor Glass Fiber 5µm Nitrile Seal 8in 20.32cm length

Product ID: F1364531
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2206
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating
5 micron, Beta 1000
See All Attributes

Red1000 Anti-Static Glass Fiber 5 micron (Beta 1000) Fluorocarbon 19in 48.26cm length

Product ID: HC2225FAP19Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2225
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Red1000 Glass Fiber 5 micron (Beta 1000) 15in 38.1cm (REPLACED BY HC2235FRP15)

Product ID: HC2235FKP15
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2235
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Red1000 Glass Fiber 5 micron (Beta 1000) Fluorocarbon 30in 76.2cm length

Product ID: HC2286FCP30Z82
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2286
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor SRT Anti-Static Glass Fiber 5 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC7504FAP8H
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC7504
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor SRT Anti-Static Glass Fiber 5 micron (Beta 1000) Fluorocarbon 16in 40.64cm length

Product ID: HC8200FAP16Z
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8200
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor SRT Anti-Static Glass Fiber 5 micron (Beta 1000) Nitrile 16in 40.64cm length

Product ID: HC8200FAP16H
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8200
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor SRT Anti-Static Glass Fiber 5 micron (Beta 1000) Nitrile 39in 99.06cm length

Product ID: HC8304FAP39H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8304
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor SRT Anti-Static Glass Fiber 5 micron (Beta 1000) Fluorocarbon 4in 10.16cm length

Product ID: HC9020FAP4Z
Unit of Measure
10/EA
Min Order Qty
10
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC9020
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes
165 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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