Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Availability

In Stock

Filter Removal Rating

5 µm

Beta Rating

BETA 1000

Ultipor III Glass Fiber 5 micron (Beta 1000) Fluorocarbon 39in 99.06cm

Product ID: HC9400FTP39Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9400
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor SRT Glass Fiber 5 micron (Beta 1000) Nitrile 7in 17.78cm (REPLACED BY HC9650FRP7HYGE)

Product ID: HC9650FAP7HYGE
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC9650
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 4in 10.16cm (REPLACED BY HC9020FRP4Z)

Product ID: HC9020FKP4H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9020
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor III Glass Fiber 5 micron (Beta 1000) Fluorocarbon 8in 20.32cm (REPLACED BY HC9021FHP8ZY923)

Product ID: HC9021FDP8ZY923
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9021
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 4in 10.16cm (REPLACED BY HC9024FRP4Z)

Product ID: HC9024FKP4H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9024
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor III Glass Fiber 5 micron (Beta 1000) Chloroprene 4in 10.16cm (REPLACED BY HC9104FRP4PYR19)

Product ID: HC9104FKP4PYR19
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9104
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Coralon Glass Fiber 5 micron (Beta 1000) Fluorocarbon 13in 33.02cm (REPLACED BY HC9401FHP13ZA)

Product ID: HC9401FCP13ZA
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9401
Family
Coralon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Coralon Glass Fiber 5 micron (Beta 1000) Chloroprene 8in 20.32cm (REPLACED BY HC9600FRP8PY547)

Product ID: HC9600FCP8PY547
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9600
Family
Coralon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 16in 40.64cm (REPLACED BY HC9600FRP16HYP80)

Product ID: HC9600FKP16HYP80
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9600
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 8in 20.32cm (REPLACED BY HC9600FRP8Z)

Product ID: HC9600FKP8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9600
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 5 micron (Beta 1000) Fluorocarbon 4in 10.16cm (REPLACED BY HC9801FHP4ZYMC)

Product ID: HC9801FDP4ZYMC
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9801
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 5 micron (Beta 1000) Nitrile 29in 73.66cm (REPLACED BY HC2225FRP29Z)

Product ID: HC2225FKP29H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2225
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)

Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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