Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Filter Removal Rating

7 µm

Beta Rating

BETA 2000

Nominal Length (Metric)

10.16 cm

Athalon Glass Fiber 7 micron (Beta 2000) Fluorocarbon 4in 10.16cm

Product ID: 8FL51010-01
Unit of Measure
16/EA
Min Order Qty
16
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE310
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
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ELEMENT UE210AN04J

Product ID: UE210AN04J
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE210
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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ELEMENT UE210AN04Z

Product ID: UE210AN04Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE210
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
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Ultipleat SRT Glass Fiber 7 micron (Beta 2000) Fluorocarbon 4in 10.16cm

Product ID: UE219AN04Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE219
Family
Ultipleat SRT
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
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Ultipleat® SRT Filter Cartridge

Product ID: UE299AN04H
Unit of Measure
16/EA
Min Order Qty
16
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE299
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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Athalon Glass Fiber 7 micron (Beta 2000) Fluorocarbon 4in 10.16cm

Product ID: UE299AN04Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE299
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 4 inches

Product ID: F1394844
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 2000
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
Filter Removal Rating (μm)
7 µm
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Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 4 Inches

Product ID: HC2196FRN4H50
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2196
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 4 Inches

Product ID: HC2208FRN4Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2208
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 4 Inches

Product ID: HC2216FRN4Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2216
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 4 Inches

Product ID: HC2217FHN4Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2217
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 4 Inches

Product ID: HC2226FRN4H50
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2226
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
See All Attributes
31 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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