Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Seal Material

Fluorocarbon

Beta Rating

BETA 2000

FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 25 μm, GlassFiber, Length 26 Inches

Product ID: HC8904FRT26Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
25 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 25 μm, GlassFiber, Length 4 inches

Product ID: HC9021FHT4Z
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
25 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 8 inches

Product ID: HC9100FRZ8Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
3 µm
Membrane Material
Glass Fiber

Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 16 inches

Product ID: HC9404FRZ16Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9404
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
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FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 25 μm, GlassFiber, Length 8 inches

Product ID: HC9800FRT8Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
25 µm
Membrane Material
Glass Fiber

Athalon Glass Fiber 25 micron (Beta 2000) Fluorocarbon 20in 50.8cm

Product ID: UE299AT20Z
Unit of Measure
15/EA
Min Order Qty
15
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE299
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
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Athalon Anti-Static Glass Fiber 7 micron (Beta 2000) Fluorocarbon 8in 20.32cm length

Product ID: UE310AN08Z-COS
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE310
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 8 Inches

Product ID: HC2207FHS8Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2207
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 8 Inches

Product ID: HC2207FHP8Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2207
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 4 Inches

Product ID: HC2208FRN4Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2208
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 6 Inches

Product ID: HC2208FRS6Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2208
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 4 Inches

Product ID: HC2208FRS4Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2208
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
See All Attributes
1,067 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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