Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Cartridge Length (Imperial)

10 in

Gasket / O-Ring Material

Fluorocarbon Elastomer

Filter Media

Polypropylene

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: PFT310UVM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, DOE industrial

Product ID: PFT310UV
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: PFT310UVM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: PFT5010UVM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
50 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, DOE industrial

Product ID: PFT510UV
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: PFT510UVM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: PFT510UVM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, Fluorocarbon Elastomer

Product ID: NXA510UM7V
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-ring

Product ID: NXT10010UM18V884
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-ring

Product ID: NXT1010UM18V884
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 120 μm, Polypropylene, Length 10 inches, Fluorocarbon Elastomer, M18 - SOE flat closed end, external 222 O-ring

Product ID: NXT12010UM18V884
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
120 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT110UM3V
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes
47 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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