Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Cartridge Length (Imperial)

20 in

Filter Media

Polypropylene

Nexis® A Series Filter Cartridges, Removal Rating 70 μm, Polypropylene, Length 20 inches

Product ID: NXA7020U
Unit of Measure
12/EA
Min Order Qty
24
Removal Rating
70 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, EPDM, Double Open Ended(DOE) with end caps and elastomer gaskets

Product ID: NXAQ1020UDOEE12
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® A Series Filter Cartridges, Polypropylene, Length 20 inches, EPDM, Single Open Ended with double O-ring bayonet lock and fin

Product ID: NXAQ4020UM7E12
Unit of Measure
12/EA
Min Order Qty
12
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
End Configuration Code
M7
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches

Product ID: NXAQ120UM7T12
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
M7
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® A Series Filter Cartridges, Polypropylene, Length 20 inches

Product ID: NXAQ320UM3F12
Unit of Measure
12/EA
Min Order Qty
12
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Type
NXAQ
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT10020UM3V
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps)

Product ID: NXT1020U42
Unit of Measure
10/EA
Min Order Qty
20
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, DOE with elastomer gasket seals and end caps

Product ID: NXT1020UDOEV
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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This product is currently not available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT2520UM3V
Unit of Measure
12/EA
Min Order Qty
24
Removal Rating
25 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-ring

Product ID: NXT3020UM18F
Unit of Measure
12/EA
Min Order Qty
24
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT320UM3V
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 20 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT5020UM3E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
418 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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