Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Cartridge Length (Imperial)

5 in

Filter Media

Polypropylene

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 5 Inches product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 5 Inches

Product ID: PFT55UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
NXA 0.5-5U product photo

Nexis, NXA, 0.5 μm, 12.7 cm (5 in), DOE industrial (no end caps)

Product ID: NXA055U
Unit of Measure
60/EA
Min Order Qty
60
Micron
0.5 micron

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 5 inches

Product ID: NXA055UDOEE
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
Gasket / O-Ring Material
EPDM
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 5 inches

Product ID: NXA55U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 5 inches

Product ID: NXT1005U
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 5 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT1005UM3V
Unit of Measure
30/EA
Min Order Qty
60
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 5 inches

Product ID: NXT105U
Unit of Measure
120/EA
Min Order Qty
120
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
Gasket / O-Ring Material
NA
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 5 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT105UM3E
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
Gasket / O-Ring Material
EPDM
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 5 inches

Product ID: NXT1505U
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
150 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 5 inches product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 5 inches

Product ID: NXT15U
Unit of Measure
60/EA
Min Order Qty
60
Micron
1 micron
Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 5 inches product photo

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 5 inches

Product ID: NXT205U
Unit of Measure
30/EA
Min Order Qty
30
Micron
20 micron

Nexis® T Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 5 inches

Product ID: NXT405U
Unit of Measure
120/EA
Min Order Qty
120
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
Gasket / O-Ring Material
NA
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
14 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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