Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Cartridge Length (Metric)

495 mm

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 19.5 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 19.5 Inches, 316 stainless steel

Product ID: G001AW195S1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 19.5 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 19.5 Inches, 316 stainless steel

Product ID: G005AW195S1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 19.5 Inches, 316 stainless steel, with Core Cover, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 19.5 Inches, 316 stainless steel, with Core Cover, Individually wrapped

Product ID: G010AW195SC1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 19.5 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 19.5 Inches

Product ID: G030AW195S1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 19.5 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 19.5 Inches

Product ID: G100AW195S1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
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Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 19.5 inches

Product ID: NXA05195UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 19.5 inches

Product ID: NXA1195UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 19.5 inches, DOE industrial (no end caps)

Product ID: NXA3195U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 19.5 inches, DOE Santoprene gasket seal

Product ID: NXA3195UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 19.5 inches

Product ID: NXA40195U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 19.5 inches

Product ID: NXT05195U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 19.5 inches product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 19.5 inches

Product ID: NXT100195U
Unit of Measure
1/EA
Min Order Qty
1
Micron
100 micron
61 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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