Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Cartridge Length (Metric)

749 mm

DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 29.5 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 29.5 Inches, 316 stainless steel

Product ID: C075AW295S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 29.5 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 29.5 Inches, 304 stainless steel

Product ID: NC010AW295A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 29.5 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 29.5 Inches, 316 stainless steel, Bulk packaging

Product ID: C001AW295S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 29.5 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 29.5 Inches, 304 stainless steel

Product ID: C005AW295A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 29.5 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 29.5 Inches, 304 stainless steel, Bulk packaging

Product ID: C010AW295A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 29.5 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 29.5 Inches, 304 stainless steel, Bulk packaging

Product ID: C020AW295A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 29.5 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 29.5 Inches, 304 stainless steel

Product ID: C05AW295AC
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 29.5 inches

Product ID: CLR10295
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.5 in
Cartridge Length (Metric)
749 mm
Cartridge Length (Metric)
74.9 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 29.5 inches

Product ID: CLR20295
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.5 in
Cartridge Length (Metric)
749 mm
Cartridge Length (Metric)
74.9 cm
Gasket / O-Ring Material
NA
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Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 29.5 Inches, Nitrile, DOE 2.54 cm (1 in) extended core

Product ID: DFNT02295UN1X
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.2 µm
Cartridge Length (Imperial)
29.5 in
Cartridge Length (Metric)
749 mm
Cartridge Length (Metric)
74.9 cm
Gasket / O-Ring Material
Nitrile
End Configuration Code
1X
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 29.5 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 29.5 Inches

Product ID: F020RW295S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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Discontinued

This part is no longer available. Please contact us for more information.
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 29.5 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 29.5 Inches, 316 stainless steel

Product ID: G001AW295S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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23 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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