Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Element Series

HC8900

Nominal OD (Metric)

9.65 cm

Seal Material

Nitrile

Ultipor III Wire Mesh 100 micron Nitrile 26in 66.04cm length

Product ID: HC8900EOS26H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC8900
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
100 µm
Nominal Length (Imperial)
26 in
See All Attributes

Ultipor III Wire Mesh 50 micron Nitrile 26in 66.04cm

Product ID: HC8900EOM26H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC8900
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
50 µm
Nominal Length (Imperial)
26 in
See All Attributes

Ultipor III Wire Mesh 25 micron Nitrile 16in 40.64cm length

Product ID: HC8900EOJ16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC8900
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
25 µm
Nominal Length (Imperial)
16 in
See All Attributes

Ultipor SRT Glass Fiber 7 micron (Beta 1000) Nitrile 39in 99.06cm (REPLACED BY HC8900FRN39HY550N1)

Product ID: HC8900FAN39HY550N1
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 7 micron (Beta 1000) Nitrile 26in 66.04cm (REPLACED BY HC8900FRN26HY550)

Product ID: HC8900FKN26HY550
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor® III Filter Element

Product ID: HC8900FKN8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 26in 66.04cm (REPLACED BY HC8900FRP26Z)

Product ID: HC8900FKP26H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor III Glass Fiber 12 micron (Beta 1000) Nitrile 8in 20.32cm (REPLACED BY HC8900FRS8Z)

Product ID: HC8900FKS8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor® III Filter Element

Product ID: HC8900FKT26H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

ELEMENT

Product ID: HC8900FKT8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Ultipor III Glass Fiber 3 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC8900FKZ8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
11 Items
  • 1

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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