Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Element Series

HC9600

Ultipor® I Cleanable Filter Element

Product ID: HC9600EOA4H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
225 µm
Nominal Length (Imperial)
4 in
See All Attributes

Ultipor III Wire Mesh 25 micron Nitrile 8in 20.32cm length

Product ID: HC9600EOJ8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
25 µm
Nominal Length (Imperial)
8 in
See All Attributes

Ultipor III Wire Mesh 50 micron Nitrile 13in 33.02cm

Product ID: HC9600EOM13H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
50 µm
Nominal Length (Imperial)
13 in
See All Attributes

Ultipor III Wire Mesh 65 micron Fluorocarbon 13in 33.02cm

Product ID: HC9600EOR13Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
65 µm
Nominal Length (Imperial)
13 in
See All Attributes

Ultipor III Wire Mesh 50 micron Fluorocarbon 8in 20.32cm length

Product ID: HC9600EOM8Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
50 µm
Nominal Length (Imperial)
8 in
See All Attributes

Ultipor III Wire Mesh 50 micron Nitrile 8in 20.32cm

Product ID: HC9600EOM8H
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
50 µm
Nominal Length (Imperial)
8 in
See All Attributes

Ultipor III Wire Mesh 50 micron Nitrile 16in 40.64cm

Product ID: HC9600EOM16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
50 µm
Nominal Length (Imperial)
16 in
See All Attributes

Ultipor III Wire Mesh 65 micron Nitrile 16in 40.64cm length

Product ID: HC9600EOR16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
65 µm
Nominal Length (Imperial)
16 in
See All Attributes

Ultipor® I Cleanable Filter Element

Product ID: HC9600EOS4H
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
100 µm
Nominal Length (Imperial)
4 in
See All Attributes

Ultipor III Wire Mesh 225 micron Fluorocarbon 13in 33.02cm

Product ID: HC9600EOT13Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
225 µm
Nominal Length (Imperial)
13 in
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor® I Cleanable Filter Element

Product ID: HC9600EOS8Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
100 µm
Nominal Length (Imperial)
8 in
See All Attributes

Ultipor III Wire Mesh 225 micron Nitrile 8in 20.32cm

Product ID: HC9600EOT8H
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
225 µm
Nominal Length (Imperial)
8 in
See All Attributes
112 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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