Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Nominal Length (Imperial)

16 in

Family

Red1000

Element Coralon HC2253FCP16H

Product ID: HC2253FCP16H
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2253
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 Micron, Beta 1000
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Element Coralon HC2253FCP16Z

Product ID: HC2253FCP16Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2253
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 Micron, Beta 1000
See All Attributes

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 16in 40.64cm (REPLACED BY HC4900FRS16Z)

Product ID: HC4900FKS16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC4900
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

HCY-8300EOJ16H

Product ID: HCY8300EOJ16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HCY830
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
22 µm
Nominal Length (Imperial)
16 in
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Red1000 Glass Fiber 12 micron (Beta 1000) Fluorocarbon 16in 40.64cm

Product ID: HC4900FCS16Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC4900
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

Red1000 Glass Fiber 22 micron (Beta 1000) Nitrile 16in 40.64cm (REPLACED BY HC4900FRT16Z)

Product ID: HC4900FCT16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC4900
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 1000
See All Attributes

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 16in 40.64cm length (REPLACED BY HC6900FRS16Z)

Product ID: HC6900FCS16HX321
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC6900
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes
7 Items
  • 1

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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