Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Ultipor

Ultipor Glass Fiber 25µm Nitrile Seal 26in 66.04cm length

Product ID: HC6500FDT26HYQ62
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC6500
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
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Ultipor Glass Fiber 7µm Nitrile Seal 8in 20.32cm length

Product ID: HC7504FKN8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC7504
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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Ultipor Glass Fiber 7µm Fluorocarbon Seal 8in 20.32cm length

Product ID: HC8904FKN8Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8904
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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Ultipor Glass Fiber 7µm Nitrile Seal 4in 10.16cm length

Product ID: HC9020FKN4HYQ62
Unit of Measure
10/EA
Min Order Qty
10
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9020
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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Ultipor Glass Fiber 12µm Nitrile Seal 13in 33.02cm length

Product ID: HC9600FKS13HYQ62
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9600
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Ultipor Glass Fiber 12µm Nitrile Seal 16in 40.64cm length

Product ID: HC9606FDS16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9606
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Ultipor, 150psi Simplex Hsg, 1.5in SAE Ports, 8in Length, Nitrile Seals

Product ID: HH2124A24KNSATYS34
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
150 psi
Port Size
1.5 in
Number of Cartridges
1
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Ultipor, 6500psi Non-bypass Duplex Hsg, 1.5in Flange Ports, 16in Length, Nitrile Seals

Product ID: HH4741G24UW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
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Ultipor, 6500psi Non-bypass Duplex Hsg, 1.5in Flange Ports, 13in Length, Nitrile Seals

Product ID: HH4741G24TW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
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Ultipor, 250psi Non-bypass Simplex Hsg, 1in SAE Ports, Nitrile Seals

Product ID: HH7400A16W1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Family
Ultipor
Pressure Rating
250 psi
Port Size
1 in
Number of Cartridges
1
Material of Construction
Cast Iron
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HH7400A16+++B1 ASSEMBLY HEAD

Product ID: HH7400A16B1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Family
Ultipor
Pressure Rating
250 psi
Port Size
1 in
Number of Cartridges
1
Material of Construction
Cast Iron
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Ultipor, 250psi Simplex Hsg, 1in SAE Ports, Nitrile Seals

Product ID: HH7400A16A1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Family
Ultipor
Pressure Rating
250 psi
Port Size
1 in
Number of Cartridges
1
Material of Construction
Cast Iron
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171 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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