Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Ultipor III

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC9601FDP8H#28
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9601
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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Ultipor III Glass Fiber Chloroprene 16in 40.64cm

Product ID: F1364497
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Nominal Length (Imperial)
16 in
Nominal Length (Metric)
40.64 cm
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Ultipor III Glass Fiber 7 micron (Beta 1000) 16in 40.64cm (REPLACED BY H9604FRNUYUR)

Product ID: H9604FKNUYUR
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9604
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
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Ultipor III Wire Mesh 65 micron Fluorocarbon 3in 7.62cm length

Product ID: HC0469EOR3Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Element Series
HC0469
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
65 µm
Nominal Length (Imperial)
3 in
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Ultipor III Fluorocarbon 40in 101.6cm length

Product ID: HC0678FGN40Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC0678
Family
Ultipor III
Filter Removal Rating (μm)
-
Nominal Length (Imperial)
40 in
Nominal Length (Metric)
101.6 cm
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This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 25 micron (Beta 1000) Nitrile 36in 91.44cm length (REPLACED BY HC0657FHT36Z)

Product ID: HC0657FDT36H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0657
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
15 µm
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This product is currently not available. Please contact us for more information.

ELEMENT 0961KR18H

Product ID: HC0961FKR18H
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Element Series
HC0961
Family
Ultipor III
Filter Removal Rating (μm)
40 µm
Nominal Length (Imperial)
18 in
Nominal Length (Metric)
45.72 cm
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Ultipor III Glass Fiber 7 micron (Beta 1000) Nitrile 8in 20.32cm (REPLACED BY HC2104FRN8Z)

Product ID: HC2104FKN8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2104
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
See All Attributes

Ultipor III Glass Fiber 7 micron (Beta 1000) Nitrile 9in 22.86cm (REPLACED BY HC2544FRN9Z)

Product ID: HC2544FKN9H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2544
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
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Ultipor III Glass Fiber 12 micron (Beta 1000) Nitrile 8in 20.32cm (REPLACED BY HC4704FRS8Z)

Product ID: HC4704FKS8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC4704
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 16in 40.64cm (REPLACED BY HC4704FRP16Z)

Product ID: HC4704FKP16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC4704
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

Ultipor III Glass Fiber 12 micron (Beta 1000) Nitrile 26in 66.04cm (REPLACED BY HC4754FRS26Z)

Product ID: HC4754FKS26H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC4754
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes
305 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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