Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Versalon

Versalon Glass Fiber Fluorocarbon 8in 20.32cm length (REPLACED BY HCG200FRD8Z)

Product ID: HCG200FKD8Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HCG200
Family
Versalon
Filter Media
Glass Fiber
Nominal Length (Imperial)
8 in
Nominal Length (Metric)
20.32 cm
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Discontinued

This part is no longer available. Please contact us for more information.

Versalon Glass Fiber 12 micron (Beta 1000) Nitrile 13in 33.02cm

Product ID: HCG300FKS13H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HCG300
Family
Versalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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HHT200A161CSRBG Assembly Filter In-Tank

Product ID: HHT200A161CSRBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
150 psi
Port Size
1 in
Number of Cartridges
1
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HHT200A161CSSBG Assembly Filter In-Tank

Product ID: HHT200A161CSSBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
150 psi
Port Size
1 in
Number of Cartridges
1
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Versalon, 150psi Simplex Hsg, 0.75in SAE Ports, 4in Length, Nitrile Seals

Product ID: HHT200A121CTRBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
150 psi
Port Size
0.75 in
Number of Cartridges
1
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Versalon, 150psi Simplex Hsg, 1in SAE Ports, 8in Length, Nitrile Seals

Product ID: HHT200A161CTSBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
150 psi
Port Size
1 in
Number of Cartridges
1
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HZG210A10CSSG1X160 Assembly Filter

Product ID: HZG210A10CSSG1X160
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
3625 psi
Port Size
0.625 in
Number of Cartridges
1
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Versalon, 1015psi Simplex Hsg, 1.25in BSP Ports, 13in Length, Fluorocarbon Seals

Product ID: HZF410C20CSTG00001
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
13 in
Family
Versalon
Pressure Rating
1015 psi
Port Size
1.25 in
Number of Cartridges
1
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This product is currently not available. Please contact us for more information.

Versalon, 1015psi Simplex Hsg, 1in BSP Ports, 4in Length, Fluorocarbon Seals

Product ID: HZF310C16CSRB00001
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
1015 psi
Port Size
1 in
Number of Cartridges
1
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Versalon, 1015psi Simplex Hsg, 1in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: HZF310C16CSSS00001
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
1015 psi
Port Size
1 in
Number of Cartridges
1
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Versalon, 6090psi Simplex Hsg, 1.25in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: HZG410C20CNSGBX160
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
6090 psi
Port Size
1.25 in
Number of Cartridges
1
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HZG210C08CSRG0X160 Assembly Filter

Product ID: HZG210C08CSRG0X160
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
3625 psi
Port Size
0.5 in
Number of Cartridges
1
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66 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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