Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Filter Grade

1 µm

Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 1 cartridge

Product ID: PEV11UEPFF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 cartridge
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 2 cartridge, Nitrile, Plastic self-adjusting flange

Product ID: PEV12UNPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 2 cartridge, Plastic self-adjusting flange

Product ID: PEV12UVPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes

Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 2 cartridge, Nitrile

Product ID: PEV12UNPFF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 1 cartridge, No flange

Product ID: PEV11UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 cartridge
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 2 cartridge, Nitrile, Plastic self-adjusting flange, FSI CBFP Series vessels

Product ID: PEV12UNPFCB
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes

Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 2 cartridge

Product ID: PEV12UVPFF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Marksman™, Large Format Filters, Filter Grade 1 µm, polypropylene, Size 1 bag, EPDM

Product ID: PFTM11UEPFA213
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 bag
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™, Large Format Filters, Filter Grade 1 µm, polypropylene, Size 1 bag

Product ID: PFTM11UNPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 bag
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™, Large Format Filters, Filter Grade 1 µm, polypropylene, Size 1 bag, EPDM, Plastic self-adjusting flange, FSI BFNP Seri es vessels (side entry), GAF6

Product ID: PFTM11UEPFB
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 bag
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Marksman™, Large Format Filters, Filter Grade 1 µm, polypropylene, Size 1 bag, No flange

Product ID: PFTM11UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 bag
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 1 µm, polypropylene, Length 20 Inches

Product ID: PFTM120UHFH1
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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50 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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