Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Filter Grade

100 µm

Nexis® High Flow Large Format Filters, Removal Rating 100 µm, Length 60 inches, Ethylene propylene O-ring

Product ID: HFNX660Y1000J
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
100 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
Cartridge Length (Imperial)
60 in
Cartridge Length (Metric)
1524 mm
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Nexis® High Flow Large Format Filters, Removal Rating 100 µm, Length 40 inches

Product ID: HFNX640Y1000J
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
100 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
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Vector™ High Flow Large Format Filters, Removal Rating 100 µm, Polypropylene, Length 40 inches

Product ID: HFV640PP100AH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
100 µm
Hardware Material
Acetal Caps
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector™ High Flow Large Format Filters, Removal Rating 100 µm, Polyester, Length 60 inches

Product ID: HFV660PE100AHU
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
100 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector™ High Flow Large Format Filters, Removal Rating 100 µm, Polypropylene, Length 60 inches

Product ID: HFV660PP100PH13
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
60/1524 inch/mm
Filter Grade
100 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector™ Large Format Filters, Removal Rating 100 μm, Polyester, Size 2 cartridge

Product ID: PEV1002UNF
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 2 cartridge
Filter Grade
100 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 100 μm, Polyester, Size 2 cartridge, Nitrile, Plastic self-adjusting flange

Product ID: PEV1002UNPFF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
100 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 100 μm, Polyester, Size 2 cartridge, FluorocarbonElastomer

Product ID: PEV1002UVPFF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
100 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 100 μm, Polyester, Size 2 cartridge, Nitrile

Product ID: PEV1002UNPFA
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 2 cartridge
Filter Grade
100 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Discontinued

This part is no longer available. Please contact us for more information.

Vector™ Large Format Filters, Removal Rating 100 μm, Polyester, Size 2 cartridge, FluorocarbonElastomer, Plastic self-adjusting flange

Product ID: PEV1002UVPFA
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 2 cartridge
Filter Grade
100 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Discontinued

This part is no longer available. Please contact us for more information.

Vector™ Large Format Filters, Removal Rating 100 μm, Polypropylene, Length Size 1 cartridge

Product ID: POV1001UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 cartridge
Filter Grade
100 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 100 μm, Polypropylene, Length Size 2 cartridge, Nitrile

Product ID: POV1002UNPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
100 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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18 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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