Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Filter Grade

3 µm

Marksman™, Large Format Filters, Filter Grade 3 µm, Borosilicate micro fiberglass with acrylic binder, Length 40 Inches

Product ID: DFNM34UNPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
3 µm
Hardware Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
40 in
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FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 4.5 µm, Pleated Polypropylene Depth Structure, Length 20 Inches, Ethylene Propylene O-ring Material

Product ID: HFU620UY045J
Unit of Measure
8/EA
Min Order Qty
8
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
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FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 10 µm, Pleated Polypropylene Depth Structure, Length 20 Inches

Product ID: HFU620UY100J
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
20.7/526 inches/mm
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 10 µm, Resinbondedglassfiber, Length 40 Inches, Nitrile O-ring Material

Product ID: HFU640GF100H13
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
See All Attributes
FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 4.5 µm, Pleated Polypropylene Depth Structure, Length 40 Inches, Nitrile O-ring Material

Product ID: HFU640UY045H13
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
See All Attributes
FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 2 µm, Pleated Polypropylene Depth Structure, Length 40 Inches, Ethylene Propylene O-ring Material

Product ID: HFU640UY020J
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
See All Attributes
FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 4.5 µm, Pleated Polypropylene Depth Structure, Length 40 Inches, Ethylene Propylene O-ring Material

Product ID: HFU640UY045J
Unit of Measure
1/EA
Min Order Qty
1
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
See All Attributes
FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 90 µm, Pleated Polypropylene Depth Structure, Length 40 Inches, Ethylene Propylene O-ring Material

Product ID: HFU640UY1000J
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
See All Attributes
FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 10 µm, Pleated Polypropylene Depth Structure, Length 40 Inches, Nitrile O-ring Material

Product ID: HFU640UY100H13
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
See All Attributes
FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 10 µm, Pleated Polypropylene Depth Structure, Length 40 Inches, Ethylene Propylene O-ring Material

Product ID: HFU640UY100J
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
See All Attributes
FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 20 µm, Pleated Polypropylene Depth Structure, Length 40 Inches, Ethylene Propylene O-ring Material

Product ID: HFU640UY200J
Unit of Measure
1/EA
Min Order Qty
1
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
See All Attributes
FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 40 µm, Pleated Polypropylene Depth Structure, Length 40 Inches

Product ID: HFU640UY400J
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
See All Attributes
25 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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