Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Availability

In Stock

Filter Media

Glass Fiber

FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 13 inches

Product ID: HC9604FRN13H
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
7 µm
Membrane Material
Glass Fiber

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 5 μm, GlassFiber, Length 13 Inches

Product ID: 0107993-KP
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 2000
Element Series
HC9600
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
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Athalon Glass Fiber 12 micron (Beta 2000) Fluorocarbon 8in 20.32cm

Product ID: 290-009-TF
Unit of Measure
16/EA
Min Order Qty
16
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE210
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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HCG200FCS4Z ELEMENT BRANDED

Product ID: 51657348
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HCG200
Family
Versalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Athalon Glass Fiber 7 micron (Beta 2000) Fluorocarbon 8in 20.32cm

Product ID: 8FL20043-01
Unit of Measure
16/EA
Min Order Qty
16
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE310
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
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Athalon Glass Fiber 7 micron (Beta 2000) Fluorocarbon 4in 10.16cm

Product ID: 8FL51010-01
Unit of Measure
16/EA
Min Order Qty
16
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE310
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 39 Inches

Product ID: EB1401K01039Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 2000
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
Filter Removal Rating (μm)
3 µm
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 20 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 20 Inches

Product ID: F010AW20A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 20 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 20 Inches

Product ID: F020AW20S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 16 inches

Product ID: F1332802
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron
Filter Removal Rating (μm)
7 µm
Nominal Length (Imperial)
16 in
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Ultipor III Glass Fiber Chloroprene 16in 40.64cm

Product ID: F1364497
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Nominal Length (Imperial)
16 in
Nominal Length (Metric)
40.64 cm
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 13 inches

Product ID: F1368441
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 2000
Element Series
HC8900
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
See All Attributes
612 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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