Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Seal Material

Fluorocarbon

Filter Media

Glass Fiber

Red1000 Glass Fiber 12 micron (Beta 1000) Fluorocarbon 16in 40.64cm

Product ID: HC4900FCS16Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC4900
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
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Red1000 Glass Fiber 12 micron (Beta 1000) Fluorocarbon 6in 15.24cm length

Product ID: HC4900FCS6Z
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC4900
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Ultipor III Glass Fiber 15 micron (Beta 1000) Fluorocarbon 13in 33.02cm

Product ID: HC6300FDT13Z
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC6300
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
15 micron (Beta 1000)
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Ultipor III Glass Fiber 5 micron (Beta 1000) Fluorocarbon 4in 10.16cm (REPLACED BY HC7400SRP4Z)

Product ID: HC7400SKP4Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC7400
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Ultipor SRT Anti-Static Glass Fiber 5 micron (Beta 1000) Fluorocarbon 8in 20.32cm length

Product ID: HC7414FAP8Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC7414
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor SRT Anti-Static Glass Fiber 5 micron (Beta 1000) Fluorocarbon 16in 40.64cm length

Product ID: HC8200FAP16Z
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8200
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor SRT Anti-Static Glass Fiber 7 micron (Beta 1000) Fluorocarbon 8in 20.32cm length

Product ID: HC8200FAN8Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8200
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

Ultipor SRT Anti-Static Glass Fiber 12 micron (Beta 1000) Fluorocarbon 39in 99.06cm length

Product ID: HC8304FAS39Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8304
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Ultipor SRT Glass Fiber 25 micron (Beta 1000) Fluorocarbon 39in 99.06cm

Product ID: HC8314FAT39Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8314
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
See All Attributes

ELEMENT 8900FTS16Z

Product ID: HC8900FTS16Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Ultipor Glass Fiber 7µm Fluorocarbon Seal 8in 20.32cm length

Product ID: HC8904FKN8Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8904
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

Ultipor SRT Anti-Static Glass Fiber 5 micron (Beta 1000) Fluorocarbon 4in 10.16cm length

Product ID: HC9020FAP4Z
Unit of Measure
10/EA
Min Order Qty
10
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC9020
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes
1,281 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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