Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Availability

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Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Seitz® HS Series Depth Filter sheet, HS 400 600x612

Product ID: 1430458
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
3.95 ft²
Filter Area (Metric)
0.37 m²
Hot Water Sanitization
85 °C
Recommended max.dp
1.5 bar
Size (Imperial)
23.62 x 24.09 in
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Seitz® HS Series Depth Filter sheet, HS 2000 600x612

Product ID: 1432058
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
3.95 ft²
Filter Area (Metric)
0.37 m²
Hot Water Sanitization
85 °C
Recommended max.dp
3 bar
Size (Imperial)
23.62 x 24.09 in
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Seitz® HS Series Depth Filter sheet, HS 2000 400x400

Product ID: 1432057
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.72 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
85 °C
Recommended max.dp
3 bar
Size (Imperial)
15.75 x 15.75 in
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Seitz® K Series Depth Filter Sheets, K 250 600x612

Product ID: B01091
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
3.95 ft²
Filter Area (Metric)
0.37 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
23.6 x 24.1 in
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Seitz® K Series Depth Filter Sheets, SEITZ-EK 400x400

Product ID: B07570
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
1.5 bar
Size (Imperial)
15.8 x 15.8 in
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Seitz® K Series Depth Filter Sheets, K 100 400x400

Product ID: B07573
Unit of Measure
1/EA
Min Order Qty
1
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
15.8 x 15.8 in
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Seitz® K Series Depth Filter Sheets, K 200 400x400

Product ID: B07628
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
15.8 x 15.8 in
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SUPRApak SW 7000 LW

Product ID: 5302741
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
16 in
Diameter (Metric)
410 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
86.1 ft²
Filtration Area (Metric)
8 m²
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SUPRApak PW 5900 LW

Product ID: 5302742
Unit of Measure
1/EA
Min Order Qty
1
Diameter (Imperial)
16 in
Diameter (Metric)
410 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
86.1 ft²
Filtration Area (Metric)
8 m²
Food Contact Compliant
Yes
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SUPRApak SW 5500 LW

Product ID: 5302803
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
16 in
Diameter (Metric)
410 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
86.1 ft²
Filtration Area (Metric)
8 m²
See All Attributes

SUPRApak SW 5700 LW

Product ID: 5302870
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
16 in
Diameter (Metric)
410 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
86.1 ft²
Filtration Area (Metric)
8 m²
See All Attributes

SUPRApak SW 5900 LW

Product ID: 5302871
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
16 in
Diameter (Metric)
410 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
86.1 ft²
Filtration Area (Metric)
8 m²
See All Attributes
35 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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