Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Filter Media

Nylon

Profile® Nylon, Filter Cartridges, Removal Rating 5 μm, Nylon

Product ID: RGN04FN050
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Nylon
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm

Discontinued

This part is no longer available. Please contact us for more information.

Profile® Nylon, Filter Cartridges, Removal Rating 30 μm, Nylon, Length 10 Inches

Product ID: RGN1F300AOC
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
30 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Profile® Nylon, Filter Cartridges, Removal Rating 20 μm, Nylon, Length 10 Inches

Product ID: RGN1FN200NPL
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Profile® Nylon, Filter Cartridges, Removal Rating 70 μm, Nylon, Length 10 Inches

Product ID: RGN1FN700NPL
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
70 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Profile® Nylon, Filter Cartridges, Removal Rating 90 μm, Nylon, Length 10 Inches

Product ID: RGN1FN900NPL
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
90 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
See All Attributes

Profile® Nylon, Filter Cartridges, Removal Rating 30 μm, Nylon, Length 10 Inches

Product ID: RGN1FN300
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
See All Attributes

Profile® Nylon, Filter Cartridges, Removal Rating 10 μm, Nylon

Product ID: RGN29FN100
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Nylon
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm

Profile® Nylon, Filter Cartridges, Removal Rating 5 μm, Nylon

Product ID: RGN29FN050
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Nylon
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm

Profile® Nylon, Filter Cartridges, Removal Rating 20 μm, Nylon, Length 10 Inches

Product ID: RGN1FN200
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
See All Attributes

Profile® Nylon, Filter Cartridges, Removal Rating 70 μm, Nylon, Length 10 Inches

Product ID: RGN1FN700
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
70 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
See All Attributes

Profile® Nylon, Filter Cartridges, Removal Rating 7 μm, Nylon, Length 20 Inches

Product ID: RGN2F070AOC
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
7 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
See All Attributes

Profile® Nylon, Filter Cartridges, Removal Rating 90 μm, Nylon, Length 10 Inches

Product ID: RGN1FN900
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
90 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
See All Attributes

This product is currently not available. Please contact us for more information.

49 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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