Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Filter Media

Polypropylene

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches

Product ID: NXT130U916
Unit of Measure
240/EA
Min Order Qty
240
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches

Product ID: NXT130U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
1 micron
NXT 150-20U product photo

Nexis, NXT, 150 μm, 50.8 cm (20 in), DOE industrial (no end caps)

Product ID: NXT15020U
Unit of Measure
1/EA
Min Order Qty
1
Micron
150 micron
Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 20 inches, EPDM, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 20 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT15020UM3E
Unit of Measure
1/EA
Min Order Qty
1
Micron
150 micron

Nexis® T Filter Cartridges, Removal Rating 15 μm, Polypropylene, Length 29.25 inches

Product ID: NXT152925U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
15 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 9.75 inches

Product ID: NXT1975U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 10 inches

Product ID: NXT20010U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
200 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT20020UM3V
Unit of Measure
1/EA
Min Order Qty
1
Micron
200 micron
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: NXT20030UM8V
Unit of Measure
1/EA
Min Order Qty
1
Micron
200 micron

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 9.75 inches

Product ID: NXT200975U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
200 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXT200TFUDOEE47
Unit of Measure
5/EA
Min Order Qty
5
Removal Rating
200 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
EPDM
End Configuration Code
DOE
End Configuration
DOE - DOE with elastomer gasket seals and end caps
Cartridge Type
NXT
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Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXT2010UDOEE
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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1,704 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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