Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Gasket / O-Ring Material

Fluorocarbon Elastomer

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Polypropylene, FluorocarbonElastomer product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Polypropylene, FluorocarbonElastomer

Product ID: C001AW30UVM3
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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Duo-Fine® , Filter Cartridges, Removal Rating 0.45 μm, Length 20 Inches, Fluorocarbon Elastomer

Product ID: DFN04520AV
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine® , Filter Cartridges, Removal Rating 0.45 μm, Length 10 Inches, Fluorocarbon Elastomer, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN04510AV
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.45 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine® , Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, Fluorocarbon Elastomer

Product ID: DFN0230AV
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.2 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine® , Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, Fluorocarbon Elastomer, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN110AV
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
1 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine® , Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: DFN1030UVM3
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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Duo-Fine® , Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Fluorocarbon Elastomer, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN130AV
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine® , Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, Fluorocarbon Elastomer, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN120AV
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine® II, Filter Cartridges, Removal Rating 30 μm, Fluorocarbon Elastomer

Product ID: DFN3021AVM25
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Gasket / O-Ring Material
Fluorocarbon Elastomer
Change Out Differential Pressure
2.4 bard
Cartridge Outer Diameter (OD) (Imperial)
2.6 in
Cartridge Outer Diameter (OD) (Metric)
6.6 cm
Gasket O-Ring Code
V
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Duo-Fine® II, Filter Cartridges, Removal Rating 30 μm, Length 20 Inches, Fluorocarbon Elastomer, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN3020AV
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes

Duo-Fine® , Filter Cartridges, Removal Rating 3 μm, Length 20 Inches, Fluorocarbon Elastomer, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN320AV
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine® , Filter Cartridges, Removal Rating 3 μm, Length 29.25 Inches, Fluorocarbon Elastomer, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN32925AV
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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213 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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