Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Minimum Batch Volume

3 L

Removal Rating

0.2 µm

Inlet Configuration

1-1½ in (25-38 mm) sanitary flange

Fluorodyne® II DFL Membrane in Kleenpak™ Capsules

Fluorodyne® II DFL Membrane in Kleenpak™ Capsules provides many benefits to their users such as high protein transmission and rapid preservative recovery. DFL is ideal for sterilizing filtration of biopharmaceutical grade fluids. Solutions with active ingredients are carefully filtered throughout DFL's compact design. Each product includes a Certificate of Test for bacterial retention and fabrication integrity.

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Supor® EKV Membrane in Kleenpak™ Capsules

Validated sterilizing grade membranes for the most cost effective filtration of a wide range of liquids such as buffers, tissue culture media, and others

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Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 1500 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation product photo

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 1500 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation

Product ID: KA3DFLP1G
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Polyvinylidene fluoride (PVDF)
Sterilization Option(s)
Suitable for Gamma Irradiation, Suitable for Autoclave
See All Attributes
Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 1500 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation product photo

Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 1500 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation

Product ID: KA3EKVP1S
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Polyethersulfone (PES)
Effective Filtration Area
1500 cm²
Sterilization Option(s)
Provided Pre-Sterilized by Gamma Irradiation
Inlet Connection
1-1½ in (25-38 mm) sanitary flange
See All Attributes
Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 1500 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation product photo

Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 1500 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation

Product ID: KA3EKVP1G
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Polyethersulfone (PES)
Effective Filtration Area
1500 cm²
Sterilization Option(s)
Suitable for Gamma Irradiation, Suitable for Autoclave
Inlet Connection
1-1½ in (25-38 mm) sanitary flange
See All Attributes
5 Items
  • 1

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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