Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Material of Construction

Aluminum|Cast Iron

Athalon, 400psi Simplex Hsg, 2in SAE Ports, 20in Length, Fluorocarbon Seals

Product ID: UR619CA3220ZG9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

UR619CA3220ZN9 ASSEMBLY HOUSING

Product ID: UR619CA3220ZN9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

UR619CA3240ZA9 ASSEMBLY HOUSING

Product ID: UR619CA3240ZA9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

UR619CC3240ZG9 ASSEMBLY HOUSING

Product ID: UR619CC3240ZG9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 400psi Simplex Hsg, 1.5in SAE Ports, 40in Length, Fluorocarbon Seals

Product ID: UR619CA3240ZG9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

UR619CC3240ZA9 ASSEMBLY HOUSING

Product ID: UR619CC3240ZA9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

UR619CA3220ZA9 ASSEMBLY HOUSING

Product ID: UR619CA3220ZA9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

UR619CC3220ZG9 ASSEMBLY HOUSING

Product ID: UR619CC3220ZG9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

UR619CC3240ZN9 ASSEMBLY HOUSING

Product ID: UR619CC3240ZN9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

UR619CA3240ZN9 ASSEMBLY HOUSING

Product ID: UR619CA3240ZN9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 400psi Simplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR619CD4040ZA9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

Athalon, 400psi Simplex Hsg, 2.5in Flange Ports, 20in Length, Fluorocarbon Seals

Product ID: UR619CD4020ZG9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes
88 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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