Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Material of Construction

Aluminum|Cast Iron

UR619CD4020ZN9 ASSEMBLY HOUSING

Product ID: UR619CD4020ZN9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

UR619CF4040ZA9 ASSEMBLY HOUSING

Product ID: UR619CF4040ZA9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

UR619CF4020ZA9 ASSEMBLY HOUSING

Product ID: UR619CF4020ZA9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

Athalon, 400psi Duplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR629CD4840ZA9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

UR629CD48++20ZA9 ASSEMBLY HOUSING

Product ID: UR629CD4820ZA9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
400 psi
Port Size
3 in
Number of Cartridges
1
See All Attributes

UR629CD48++20ZN9 ASSEMBLY HOUSING

Product ID: UR629CD4820ZN9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
400 psi
Port Size
3 in
Number of Cartridges
1
See All Attributes

UR629CF48++40ZN9 ASSEMBLY HOUSING

Product ID: UR629CF4840ZN9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

Athalon, 400psi Duplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR649CD4840ZA9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
2 per side
See All Attributes

Athalon, 400psi Duplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR629CD6440ZG9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

UR649CF48++40ZG9 ASSEMBLY HOUSING

Product ID: UR649CF4840ZG9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
2 per side
See All Attributes

Athalon, 400psi Non-bypass Duplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR629CD4840ZN9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes

Athalon, 400psi Duplex Hsg, 2.5in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UR629CF6440ZA9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
2.5 in
Number of Cartridges
1
See All Attributes
88 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

    Select Language :
    English