Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Minimum Batch Volume

<1 L

Supracap™ 50 depth filter capsule with single-layer media grade EKSP (0.1-0.3 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade EKSP (0.1-0.3 µm retention rating) and luer-lock connections

Product ID: SC050PEKS
Unit of Measure
1/EA
Min Order Qty
1
Retention Rating
0.1-0.3 µm
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with activated carbon type AKS4 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with activated carbon type AKS4 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections

Product ID: SC050XAK4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with activated carbon type AKS1 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with activated carbon type AKS1 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections

Product ID: SC050XAK1
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with activated carbon type AKS5 (typical target contaminant molecular weight 200-400 Da) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with activated carbon type AKS5 (typical target contaminant molecular weight 200-400 Da) and luer-lock connections

Product ID: SC050XAK5
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with activated carbon type AKS6 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with activated carbon type AKS6 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections

Product ID: SC050XAK6
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with activated carbon type AKS7 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with activated carbon type AKS7 (typical target contaminant molecular weight 400-1500 Da) and luer-lock connections

Product ID: SC050XAK7
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with single-layer media grade SUPRA 80P (1-3 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade SUPRA 80P (1-3 µm retention rating) and luer-lock connections

Product ID: SC050P080
Unit of Measure
1/EA
Min Order Qty
1
Retention Rating
1-3 µm
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with single-layer media grade BIO 10 (0.2-0.4 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade BIO 10 (0.2-0.4 µm retention rating) and luer-lock connections

Product ID: SC050B010
Unit of Measure
1/EA
Min Order Qty
1
Retention Rating
0.2-0.4 µm
Membrane Material
Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with single-layer media grade T1500P (11-30 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade T1500P (11-30 µm retention rating) and luer-lock connections

Product ID: SC050P1500
Unit of Measure
1/EA
Min Order Qty
1
Retention Rating
11-30 µm
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with single-layer media grade K200P (3-6 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade K200P (3-6 µm retention rating) and luer-lock connections

Product ID: SC050P200
Unit of Measure
1/EA
Min Order Qty
1
Retention Rating
3-6 µm
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with single-layer media grade K250P (4-9 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade K250P (4-9 µm retention rating) and luer-lock connections

Product ID: SC050P250
Unit of Measure
1/EA
Min Order Qty
1
Retention Rating
4-9 µm
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with single-layer media grade K100P (1-3 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade K100P (1-3 µm retention rating) and luer-lock connections

Product ID: SC050P100
Unit of Measure
1/EA
Min Order Qty
1
Retention Rating
1-3 µm
Membrane Material
Regenerated Cellulose
Maximum Batch Volume
3 L
Effective Filtration Area (Metric)
22 cm²
See All Attributes
28 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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