Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Nominal Length (Imperial)

10 in

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 10 inches

Product ID: HC9725FRN10Z
Unit of Measure
4/EA
Min Order Qty
4
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9725
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 12 μm, GlassFiber, Length 10 inches

Product ID: HC9725FRS10Z
Unit of Measure
4/EA
Min Order Qty
4
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9725
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 5 μm, GlassFiber, Length 10 inches

Product ID: HC9725FRP10Z
Unit of Measure
4/EA
Min Order Qty
4
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9725
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
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Ultipor Glass Fiber 5µm Nitrile Seal 10in 25.4cm length

Product ID: HC9730FKP10H
Unit of Measure
4/EA
Min Order Qty
4
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9730
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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Claris® Filter Cartridge, CLR1010W480

Product ID: CLR1010W480
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket O-Ring Code
Blank
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Claris® Filter Cartridge, CLR110W480

Product ID: CLR110W480
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket O-Ring Code
Blank
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 5 μm, GlassFiber, Length 10 inches

Product ID: HA522602
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 2000
Element Series
HA522
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 5 μm, GlassFiber, Length 10 Inches

Product ID: HC2233FRP10Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2233
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 10 Inches

Product ID: HC2233FRN10HCN
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2233
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 25 μm, GlassFiber, Length 10 Inches

Product ID: HC2233FRT10Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2233
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
25 micron (Beta 2000)
See All Attributes
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 12 μm, GlassFiber, Length 10 Inches

Product ID: HC2233FRS10Z
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
12 µm
Membrane Material
Glass Fiber

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 10 Inches

Product ID: HC2235FRN10
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2235
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
See All Attributes
80 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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