Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Nominal Length (Imperial)

26 in

Seal Material

Nitrile

Nominal OD (Imperial)

3.8 in

Ultipor Glass Fiber 25µm Nitrile Seal 26in 66.04cm length

Product ID: HC6500FDT26HYQ62
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC6500
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
See All Attributes

HCY-8900EOM26H

Product ID: HCY8900EOM26H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HCY890
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
50 µm
Nominal Length (Imperial)
26 in
See All Attributes

Ultipor III Glass Fiber 12 micron (Beta 1000) Nitrile 26in 66.04cm (REPLACED BY HC6500FRS26Z)

Product ID: HC6500FDS26H
Unit of Measure
1/EA
Min Order Qty
8
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC6500
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

Ultipor III Wire Mesh 100 micron Nitrile 26in 66.04cm length

Product ID: HC8900EOS26H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC8900
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
100 µm
Nominal Length (Imperial)
26 in
See All Attributes

Ultipor III Wire Mesh 50 micron Nitrile 26in 66.04cm

Product ID: HC8900EOM26H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC8900
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
50 µm
Nominal Length (Imperial)
26 in
See All Attributes

Ultipor® III Filter Element

Product ID: HC8900FKT26H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Ultipor SRT Glass Fiber 12 micron (Beta 1000) Nitrile 26in 66.04cm

Product ID: HC8904FMS26H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8904
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Ultipor SRT Glass Fiber 25 micron (Beta 1000) Nitrile 26in 66.04cm (REPLACED BY HC8904FRT26Z)

Product ID: HC8904FMT26H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8904
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 7 micron (Beta 1000) Nitrile 26in 66.04cm (REPLACED BY HC8900FRN26HY550)

Product ID: HC8900FKN26HY550
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 26in 66.04cm (REPLACED BY HC8900FRP26Z)

Product ID: HC8900FKP26H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8900
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor III Glass Fiber 25 micron (Beta 1000) Nitrile 26in 66.04cm (REPLACED BY HC9901FHT26Z)

Product ID: HC9901FDT26H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9901
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
17 µm
See All Attributes
11 Items
  • 1

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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