Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Nominal OD (Imperial)

6 in

Ultipor Glass Fiber 7µm Nitrile Seal 18in 45.72cm length

Product ID: HC0101FKN18HY533
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0101
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating
7 micron, Beta 1000
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Ultipor Glass Fiber 3µm Nitrile Seal 36in 91.44cm length

Product ID: HC0101FKZ36H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0101
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
See All Attributes

Red1000 Glass Fiber 3 micron (Beta 1000) Fluorocarbon 18in 45.72cm

Product ID: HC2618FAZ18Z
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2618
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 1000)
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Ultipor Glass Fiber 5µm Fluorocarbon Seal 36in 91.44cm length

Product ID: HC2618FKP36Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor Glass Fiber 12µm Fluorocarbon Seal 18in 45.72cm length

Product ID: HC2618FKS18Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Ultipor Glass Fiber 12µm Fluorocarbon Seal 36in 91.44cm length

Product ID: HC2618FKS36Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Ultipor Glass Fiber 25µm Fluorocarbon Seal 36in 91.44cm length

Product ID: HC2618FKT36Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
See All Attributes

Ultipor III Wire Mesh 50 micron Nitrile 26in 66.04cm

Product ID: HC8300EOM26H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC8300
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
50 µm
Nominal Length (Imperial)
26 in
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Ultipor SRT Anti-Static Glass Fiber 3 micron (Beta 1000) Nitrile 16in 40.64cm length

Product ID: HC8300FAZ16H
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8300
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
See All Attributes

HC8300EOT16H

Product ID: HC8300EOT16H
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Element Series
HC8300
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
225 µm
Nominal Length (Imperial)
16 in
See All Attributes

Ultipor SRT Anti-Static Glass Fiber 5 micron (Beta 1000) Nitrile 39in 99.06cm length

Product ID: HC8304FAP39H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8304
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor SRT Glass Fiber 12 micron (Beta 1000) Nitrile 39in 99.06cm

Product ID: HC8304FAS39H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC8304
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes
139 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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