Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Nominal OD (Metric)

7.11 cm

Seal Material

Nitrile

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 13in 33.02cm (REPLACED BY HC9100FRP13Z)

Product ID: HC9100FKP13H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9100
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor III Glass Fiber 17 micron (Beta 1000) Nitrile 8in 20.32cm (REPLACED BY HC9101FHT8Z)

Product ID: HC9101FDT8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9101
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
17 µm
See All Attributes

Ultipor III Glass Fiber 12 micron (Beta 1000) Nitrile 8in 20.32cm (REPLACED BY HC9101FHS8Z)

Product ID: HC9101FDS8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9101
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Ultipor III Glass Fiber 7 micron (Beta 1000) Nitrile 4in 10.16cm (REPLACED BY HC9104FRN4Z)

Product ID: HC9104FKN4H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9104
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 4in 10.16cm length

Product ID: HC2218FKN4H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2218
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

HC2226EOJ6H50

Product ID: HC2226EOJ6H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2226
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
22 µm
Nominal Length (Imperial)
6 in
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Ultipor III Glass Fiber 7 micron (Beta 1000) Nitrile 8in 20.32cm (REPLACED BY HC9100FRN8Z)

Product ID: HC9100FKN8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9100
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 4in 10.16cm (REPLACED BY HC9100FRP4Z)

Product ID: HC9100FKP4H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9100
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor III Glass Fiber 7 micron (Beta 1000) Nitrile 8in 20.32cm (REPLACED BY HC9104FRN8HYP52)

Product ID: HC9104FKN8HYP52
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9104
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 10in 25.4cm (REPLACED BY HC9725FRN10Z)

Product ID: HC9725FKN10H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9725
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 6in 15.24cm (REPLACED BY HC2218FRS6Z)

Product ID: HC2218FKS6H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2218
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

Red1000 Glass Fiber 25 micron (Beta 1000) Nitrile 6in 15.24cm length (REPLACED BY HC2218FRT6Z)

Product ID: HC2218FKT6H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2218
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
See All Attributes
16 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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