Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 13 inches

Product ID: HC9604FRN13H
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
7 µm
Membrane Material
Glass Fiber

SUPRAdisc SD II EKS 200XEKSC440SPW

Product ID: 7007957
Unit of Measure
1/EA
Min Order Qty
1
1. Recommended Max. Backpressure During Backwash
0.5 bar
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
Diameter (Imperial)
16 in
Diameter (Metric)
410 mm
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Duo-Fine®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches

Product ID: DFPT1020ETM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
M3
End Configuration
SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0) 3
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 25 μm, GlassFiber, Length 9 inches

Product ID: HC9700FRT9Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9700
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
25 micron (Beta 2000)
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MCY4463J200H13

Product ID: MCY4463J200H13
Unit of Measure
12/EA
Min Order Qty
12

Nexis® T Series Filter Cartridges, Polypropylene, 5 µm, 30 in., Silicone Elastomer, M7

Product ID: NXT530UM7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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T-series Centramate™ Cassette, Omega PES membrane, 10 kDa molecular weight cut-off (MWCO), 0.01 m² effective filtration area (EFA) product photo

T-series Centramate™ Cassette, Omega PES membrane, 10 kDa molecular weight cut-off (MWCO), 0.01 m² effective filtration area (EFA)

Product ID: OS010T01
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
100 cm²
Membrane Material
Polyethersulfone (PES)
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PF 2-30AE

Product ID: PF230AE
Unit of Measure
1/EA
Min Order Qty
1
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 19.5 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 19.5 Inches, 316 stainless steel, Bulk packaging

Product ID: RT001AW195S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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UE209AP07Z ELEMENT

Product ID: UE209AP07Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE209
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
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ELEMENT UE210AS13Z

Product ID: UE210AS13Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE210
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
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WCN150HFU618UY020JU

Product ID: WCN150HFU618S00001
Unit of Measure
4/EA
Min Order Qty
4
1,611 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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