Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Availability

In Stock

Filter Removal Rating

40 µm

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 40 μm, GlassFiber, Length 39 Inches

Product ID: HC8904FRR39Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Element Series
HC8904
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
40 micron
Filter Removal Rating (μm)
40 µm
See All Attributes

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 40 μm, GlassFiber, Length 8 inches

Product ID: HC9800FRR8YR26
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Element Series
HC9800
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
40 micron
Filter Removal Rating (μm)
40 µm
See All Attributes

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 40 μm, GlassFiber, Length 6 Inches

Product ID: HC2235FRR6
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Element Series
HC2235
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
40 micron
Filter Removal Rating (μm)
40 µm
See All Attributes

UE210KR01Z ELEMENT

Product ID: UE210KR01Z
Unit of Measure
16/EA
Min Order Qty
16
Anti-Static
Yes
Element Series
UE210
Family
Athalon
Filter Removal Rating (μm)
40 µm
Nominal Length (Imperial)
1 in
Nominal Length (Metric)
2.54 cm
See All Attributes

Athalon 40 micron Fluorocarbon 20in 50.8cm

Product ID: UE310KR20Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Element Series
UE310
Family
Athalon
Filter Removal Rating (μm)
40 µm
Nominal Length (Imperial)
20 in
Nominal Length (Metric)
50.8 cm
See All Attributes

Athalon 40 micron Fluorocarbon 40in 101.6cm

Product ID: UE310KR40Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Element Series
UE310
Family
Athalon
Filter Removal Rating (μm)
40 µm
Nominal Length (Imperial)
40 in
Nominal Length (Metric)
101.6 cm
See All Attributes

Athalon 40 micron Fluorocarbon 20in 50.8cm

Product ID: UE610KR20Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Element Series
UE610
Family
Athalon
Filter Removal Rating (μm)
40 µm
Nominal Length (Imperial)
20 in
Nominal Length (Metric)
50.8 cm
See All Attributes

Athalon 40 micron Fluorocarbon 40in 101.6cm

Product ID: UE610KR40Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Element Series
UE610
Family
Athalon
Filter Removal Rating (μm)
40 µm
Nominal Length (Imperial)
40 in
Nominal Length (Metric)
101.6 cm
See All Attributes

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 40 μm, GlassFiber, Length 39 Inches

Product ID: HC8314FRR39Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Element Series
HC8314
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
40 micron
Filter Removal Rating (μm)
40 µm
See All Attributes
9 Items
  • 1

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

    Select Language :
    English