Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Removal Rating

0.2 µm

Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 375 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation

Product ID: KA1EKVP1S

Product ID
KA1EKVP1S

Unit of Measure
1/EA

Min Order Qty
1

Removal Rating

0.2 µm

Membrane Material

Polyethersulfone (PES)

Effective Filtration Area

375 cm²

Sterilization Option(s)

Provided Pre-Sterilized by Gamma Irradiation

Inlet Connection

1-1½ in (25-38 mm) sanitary flange

Materials	Medium: Polypropylene Core, cage, and endcaps: polypropylene O-ring options: ethylene propylene (EPR)
Removal ratings	100 nm
Configurations	Nominal length: 102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in Diameter: 63 mm / 2.5 in O-ring size / end caps: Code 19 (222 double O-ring flat end)
Operating conditions	Maximum operating temperature: 82°C / 180°F Maximum differential pressure: 0.41 MPa @ 30°C / 60 psid @ 85°F 0.34 MPa @ 50°C / 50 psid @ 120°F 0.2 MPa @ 70°C / 30 psid @ 160°F 0.1 MPa @ 82°C / 15 psid @ 180°F

Profile® Nano Depth Filter Cartridge

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Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 375 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation

Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 375 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation

Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 375 cm² EFA, ½ in. hose barb connections, suitable for gamma irradiation

Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 375 cm² EFA, ½ in. hose barb connections, pre-sterilized by gamma irradiation

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, ¼-½ in. hose barb connections, suitable for gamma irradiation

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, 1½ in. sanitary flange inlet and ½ in. hose barb outlet connections, pre-sterilized by gamma irradiation

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 380 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation

Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 750 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation

Supor® EKV membrane in Kleenpak™ capsule, 0.2 µm removal rating, 750 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 380 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 820 cm² EFA, ¼-½ in. hose barb connections, pre-sterilized by gamma irradiation

Emflon® PFRW Kleenpak™ Capsules, KA2PFRW1

Description

Applications/Use

Microelectronics:

Specifications

Documents

Data Sheets

Profile® Nano Filters for CMP Applications

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