Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Seal Material

Ethylene Propylene

Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 13 inches

Product ID: HC9601FHP13J
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9601
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 8 inches

Product ID: HC9601FHP8JY806
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9601
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 25 μm, GlassFiber, Length 8 inches

Product ID: HC9601FHT8JY806
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9601
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
25 micron (Beta 2000)
See All Attributes

Athalon Anti-Static Glass Fiber 12 micron (Beta 2000) Ethylene Propylene 13in 33.02cm length

Product ID: UE310AS13J
Unit of Measure
15/EA
Min Order Qty
15
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE310
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Athalon Glass Fiber 12 micron (Beta 2000) Ethylene Propylene 8in 20.32cm

Product ID: UE310AS08J
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE310
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Element Coralon HC2216FCS6J

Product ID: HC2216FCS6J
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2216
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Ultipor III Glass Fiber 25 micron (Beta 1000) Ethylene Propylene 16in 40.64cm (REPLACED BY HC8200FRT16J)

Product ID: HC8200FKT16J
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC8200
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 8 Inches

Product ID: HC8300FRS8JY806
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC8300
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 16 Inches

Product ID: HC8314FRP16J
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC8314
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 16 Inches

Product ID: HC8314FRZ16J
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC8314
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 8 Inches

Product ID: HC8700FRP8J
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC8700
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 39 Inches

Product ID: HC8400FRP39J
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC8400
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
See All Attributes

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)

Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

    Select Language :