Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Seal Material

Fluorocarbon

Ultipor Glass Fiber 5µm Fluorocarbon Seal 18in 45.72cm length

Product ID: HC2295FKP18Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2295
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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Ultipor, 6000psi Non-bypass Simplex Hsg, 2in Flange Ports, 26in Length, Fluorocarbon Seals

Product ID: HZ9901D32VW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (3000 #)
Cartridge Length (Imperial)
26 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
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This product is currently not available. Please contact us for more information.

UR619CA3240ZA9 ASSEMBLY HOUSING

Product ID: UR619CA3240ZA9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
400 psi
Port Size
1.5 in
Number of Cartridges
1
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HZ4711C24TW9YE47 ASSEMBLY HOUSING

Product ID: HZ4711C24TW9YE47
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1
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This product is currently not available. Please contact us for more information.

Ultipor, 6500psi Non-bypass Simplex Hsg, 1in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ4511C16SW9YE47
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1 in
Number of Cartridges
1
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This product is currently not available. Please contact us for more information.

Ultipor, 6500psi Non-bypass Simplex Hsg, 1.5in BSP Ports, 16in Length, Fluorocarbon Seals

Product ID: HZ4711C24UW9YE47
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1
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Ultipor, 6500psi Non-bypass Simplex Hsg, 1.5in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: HZ4711G24TW9YE47
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1
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This product is currently not available. Please contact us for more information.

Ultipor, 6500psi Non-bypass Duplex Hsg, 1.5in BSP Ports, 13in Length, Fluorocarbon Seals

Product ID: HZ4741C24TW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
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Ultipor, 6500psi Non-bypass Duplex Hsg, 1.5in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: HZ4751E24TW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
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Ultipor, 6500psi Non-bypass Duplex Hsg, 1.5in Flange Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ4751E24SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
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Ultipor, 6500psi Non-bypass Duplex Hsg, 1.5in Flange Ports, 16in Length, Fluorocarbon Seals

Product ID: HZ4751E24UW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
See All Attributes

Ultipor, 6500psi Non-bypass Duplex Hsg, 1.5in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ4741C24SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
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1,841 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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