Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Seal Material

Fluorocarbon

Athalon Anti-Static Glass Fiber 7 micron (Beta 2000) Fluorocarbon 8in 20.32cm length

Product ID: UE310AN08Z-COS
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE310
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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Ultipor III Glass Fiber 12 micron (Beta 1000) Fluorocarbon 4in 10.16cm (REPLACED BY HC9020FRS4Z)

Product ID: HC9020FKS4Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9020
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Discontinued

This part is no longer available. Please contact us for more information.

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 25 μm, GlassFiber, Length 8 Inches

Product ID: 64/05002117/33
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
25 micron (Beta 2000)
Filter Removal Rating (μm)
25 µm
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Red1000 Anti-Static Glass Fiber 5 micron (Beta 1000) Fluorocarbon 19in 48.26cm length

Product ID: HC2225FAP19Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2225
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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Ultipor Glass Fiber 12µm Fluorocarbon Seal 19in 48.26cm length

Product ID: HC2225FKS19Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2225
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Ultipor Glass Fiber 25µm Fluorocarbon Seal 8in 20.32cm length

Product ID: HC2253FKT8Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2253
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
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Ultipor Glass Fiber 7µm Fluorocarbon Seal 10in 25.4cm length

Product ID: HC2256FKN10Z
Unit of Measure
4/EA
Min Order Qty
4
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2256
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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Ultipor Glass Fiber 5µm Fluorocarbon Seal 10in 25.4cm length

Product ID: HC2256FKP10Z
Unit of Measure
4/EA
Min Order Qty
4
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2256
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Element Coralon HC2286FCP12Z50

Product ID: HC2286FCP12Z50
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2286
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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Red1000 Glass Fiber 5 micron (Beta 1000) Fluorocarbon 30in 76.2cm length

Product ID: HC2286FCP30Z82
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2286
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Red1000 Glass Fiber 12 micron (Beta 1000) Fluorocarbon 18in 45.72cm

Product ID: HC2295FCS18Z
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2295
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
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Ultipor Glass Fiber 7µm Fluorocarbon Seal 14in 35.56cm length

Product ID: HC2295FKN14Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2295
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes
1,841 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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