Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Seal Material

Nitrile

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 36in 91.44cm

Product ID: HC2296FKS36H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC9601FDP8H#28
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9601
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 8 inches

Product ID: HC5150FRS8Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC0008
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
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FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 13 inches

Product ID: HC9604FRN13H
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
7 µm
Membrane Material
Glass Fiber

Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 9in 22.86cm (REPLACED BY HC2225FRN9Z)

Product ID: HC2225FKN9H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2225
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
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Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 6in 15.24cm (REPLACED BY HC2233FRN6Z)

Product ID: HC2233FKN6H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2233
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
See All Attributes

Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 10in 25.4cm (REPLACED BY HC2246FRN10H50)

Product ID: HC2246FKN10H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2246
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 5 micron (Beta 1000) Nitrile 10in 25.4cm (REPLACED BY HC2246FRP10H50)

Product ID: HC2246FKP10H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2246
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 22 micron (Beta 1000) Nitrile 6in 15.24cm (REPLACED BY HC2246FRT6H50)

Product ID: HC2246FKT6H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2246
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 1000
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 6in 15.24cm (REPLACED BY HC2246FRS6H50)

Product ID: HC2246FKS6H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2246
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 17 Inches

Product ID: HC2263FRS17HYT09
Unit of Measure
2/EA
Min Order Qty
2
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2263
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
See All Attributes

Coralon Glass Fiber 12µm Nitrile Seal 30in 76.2cm length (REPLACED BY HC2286FRS30H50YT)

Product ID: HC2286FCS30H50YT
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2286
Family
Coralon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes
868 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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