Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Seal Material

Viton

INDICATOR RCA216CZ090ZX

Product ID: RCA216CZ090ZX
Unit of Measure
1/EA
Min Order Qty
1
Indication Pressure (Metric)
2.4 bar
Seal Material
Viton
Switch Type
Normally Open

INDICATOR RCA217UZ090ZX

Product ID: RCA217UZ090ZX
Unit of Measure
1/EA
Min Order Qty
1
Indication Pressure (Metric)
2.4 bar
Seal Material
Viton
Switch Type
Normally Open

INDICATOR RCA217UZ091ZX

Product ID: RCA217UZ091ZX
Unit of Measure
1/EA
Min Order Qty
1
Indication Pressure (Metric)
3.4 bar
Seal Material
Viton
Switch Type
Normally Open

INDICATOR RCA217UZ091Z

Product ID: RCA217UZ091Z
Unit of Measure
1/EA
Min Order Qty
1
Indication Pressure (Metric)
3.4 bar
Seal Material
Viton
Switch Type
Normally Closed

INDICATOR RCA218RZ084Z

Product ID: RCA218RZ084Z
Unit of Measure
1/EA
Min Order Qty
1
Indication Pressure (Metric)
1.1 bar
Seal Material
Viton
Switch Type
SPDT

INDICATOR RCA218RZ090Z

Product ID: RCA218RZ090Z
Unit of Measure
1/EA
Min Order Qty
1
Indication Pressure (Metric)
2.4 bar
Seal Material
Viton
Switch Type
SPDT

RCA222ZK4024 PRESSURE TRANSDUCER

Product ID: RCA222ZK4024
Unit of Measure
1/EA
Min Order Qty
1
Electrical Output
4-20 mA mA
Lower Indication Pressure (Metric)
1.8 bar
Maximum Pressure Range (Metric)
4 bar
Minimum Pressure Range (Metric)
1 bar
Seal Material
Viton
Upper Indication Point (Metric)
2.4 bar
See All Attributes

INDICATOR RCA219DZ084Z

Product ID: RCA219DZ084Z
Unit of Measure
1/EA
Min Order Qty
1
Indication Pressure (Metric)
1.1 bar
Seal Material
Viton
Switch Type
Visual

INDICATOR RCA218MZ097Z

Product ID: RCA218MZ097Z
Unit of Measure
1/EA
Min Order Qty
1
Indication Pressure (Metric)
6.9 bar
Seal Material
Viton
Switch Type
SPDT

INDICATOR RCA218RZ091Z

Product ID: RCA218RZ091Z
Unit of Measure
1/EA
Min Order Qty
1
Indication Pressure (Metric)
3.4 bar
Seal Material
Viton
Switch Type
SPDT

INDICATOR RCA219DZ090Z

Product ID: RCA219DZ090Z
Unit of Measure
1/EA
Min Order Qty
1
Indication Pressure (Metric)
2.4 bar
Seal Material
Viton
Switch Type
Visual

INDICATOR RCA216CZ091Z

Product ID: RCA216CZ091Z
Unit of Measure
1/EA
Min Order Qty
1
Indication Pressure (Metric)
3.4 bar
Seal Material
Viton
Switch Type
Normally Closed
20 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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