Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Product Type

Filter Cartridges

Cartridge Length (Metric)

762 mm

Filter Media

Polypropylene

Profile® Star Filter Cartridge, AB3A0157WH4

Product ID: AB3A0157WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXA130U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
1 micron
Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches product photo

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches

Product ID: NXT2030U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
20 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches

Product ID: NXT1030U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
10 micron
NXT 75-30U product photo

Nexis, NXT, 75 μm, 76.2 cm (30 in), DOE industrial (no end caps)

Product ID: NXT7530U
Unit of Measure
1/EA
Min Order Qty
1
Micron
75 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, Nitrile, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, Nitrile, DOE industrial

Product ID: PFT1030UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, EPDM, DOE industrial

Product ID: PFT330UE967
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 Inches, EPDM, DOE industrial

Product ID: PFT530UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: PFT530UVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: RM298F010H21TIMMD
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes

Profile® Star Filter Cartridge, AB3A0107WH4

Product ID: AB3A0107WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: R3F050
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration
R type housing
See All Attributes
436 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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