Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Industries

Industrial Manufacturing

Family

Red1000

Anti Static

Yes

Red1000 Anti-Static Glass Fiber 12 micron (Beta 1000) Nitrile 36in 91.44cm length

Product ID: HCY143922FMS36H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HCY143
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 18in 45.72cm (REPLACED BY HCY143483FRS18Z)

Product ID: HCY143483FAS18H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HCY143
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Red1000 Glass Fiber 3 micron (Beta 1000) Fluorocarbon 18in 45.72cm

Product ID: HC2618FAZ18Z
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2618
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 1000)
See All Attributes

Red1000 Anti-Static Glass Fiber 5 micron (Beta 1000) Fluorocarbon 19in 48.26cm length

Product ID: HC2225FAP19Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2225
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Red1000 Glass Fiber 7 micron (Beta 1000) Fluorocarbon 8in 20.32cm (REPLACED BY HC2006FRN28Z)

Product ID: HC2006FAN28Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2006
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
See All Attributes

Red1000 Anti-Static Glass Fiber 7 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC2544FMN28H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2544
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 4in 10.16cm (REPLACED BY HC2216FRN14Z)

Product ID: HC2216FAN14H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2216
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 9in 22.86cm (REPLACED BY HC2225FRN9Z)

Product ID: HC2225FAN9H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2225
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 22 micron (Beta 1000) Nitrile 36in 91.44cm (REPLACED BY HC2618FRT36Z)

Product ID: HC2618FMT36H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2618
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 1000
See All Attributes

This product is currently not available. Please contact us for more information.

Red1000 Anti-Static Glass Fiber 12 micron (Beta 1000) Nitrile 15in 38.1cm length

Product ID: HC2286FAS15H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2286
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Red1000 Anti-Static Glass Fiber 7 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC0101FMN18H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC0101
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
See All Attributes

Red1000 Anti-Static Glass Fiber 12 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC0101FAS18H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC0101
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)

Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

    Select Language :