Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Industries

Industrial Manufacturing

Cartridge Length (Metric)

749 mm

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 29.5 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 29.5 Inches, 304 stainless steel

Product ID: C005AW295A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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Duo-Fine®, Filter Cartridges, Removal Rating 0.45 μm, Length 29.5 Inches, Nitrile, DOE 2.54 cm (1 in) extended core

Product ID: DFN045295UN1X
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
29.5 in
Cartridge Length (Metric)
749 mm
Cartridge Length (Metric)
74.9 cm
Gasket / O-Ring Material
Nitrile
End Configuration Code
1X
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DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 29.5 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 29.5 Inches, Polypropylene

Product ID: U100AW295U
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes

Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 29.5 Inches, Nitrile, DOE 2.54 cm (1 in) extended core

Product ID: DFNT02295UN1X
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.2 µm
Cartridge Length (Imperial)
29.5 in
Cartridge Length (Metric)
749 mm
Cartridge Length (Metric)
74.9 cm
Gasket / O-Ring Material
Nitrile
End Configuration Code
1X
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Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 29.5 inches

Product ID: CLR20295
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.5 in
Cartridge Length (Metric)
749 mm
Cartridge Length (Metric)
74.9 cm
Gasket / O-Ring Material
NA
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 29.5 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 29.5 Inches

Product ID: F020RW295S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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Discontinued

This part is no longer available. Please contact us for more information.
DFT Classic®, Filter Cartridges, Removal Rating 200 μm, Length 29.5 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 200 μm, Length 29.5 Inches, Polypropylene

Product ID: U200AW295U
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 29.5 Inches, silicone product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 29.5 Inches, silicone

Product ID: PFT045295US
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 29.5 inches

Product ID: CLR30295
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.5 in
Cartridge Length (Metric)
749 mm
Cartridge Length (Metric)
74.9 cm
Gasket / O-Ring Material
NA
See All Attributes
9 Items
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Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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